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Semiconductor Day

Probe Microscope

A Scan Kelvin Probe Microscope (SKPM) was developed to measure the distribution of local surface potential using sub-micrometer resolution. Enter the SKPM surface potential is measured by the Inter-Atomic Force Microscope (AFM). VCPD measurement by disabling the conductive chip external current. Because of its advanced nanometer size, it's not feasible in these situations, and consequently it's not. Following a very small flow, the interaction between the chip and the sample is detected in the following ways - Changes in the vibration characteristics of the AFM tip to achieve these goals. A potential VDC and frequency fik perturbation bias VAC are accepted at the end of the line. The force between the tip and the sample is given in the following formula. In general, it is not just the electrical interaction between chips and sample sensing. Measurement of electrical length between samples as well as surface potential measurements. In much larger cantilever FM mode, ect does not occur much, so - Improved spatial resolution. Conversely, setting AM mode usually improves signal-to-noise ratio and gives energy resolution up to 5 mV.

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